A Magnetic Levitated Switched Reluctance Motor System for High- Precision Position Control Applications

The investigation, development and fabrication of a magnetic levitated linear motion system, based on Switched Reluctance (SR) principle for high-acceleration and high-precision position control applications, are addressed in this paper. The proposed system is very suitable for applications that require highperformance linear motions: from high-precision manufacturing machines, clean-room wafer carrier systems, to high-speed material transportation in factories and warehouses. The proposed system employs a novel linear machine structure which uses four coils for levitation, and three coils for propulsion. Comparing to Permanent-Magnet (PM) track levitation, high-temperature superconductor levitation, and other existing magnetic levitation methods, the proposed system has a much simpler structure, lower manufacturing cost, and higher reliability. In this paper, the mechanical structure of the proposed levitation system and the model of the actuators are discussed. Simulation results are also performed to validate the design concept. Finally, the nonlinear force control for the magnetic levitated and propelled axes is considered so as to achieve a stable and high-precision position control